Product
Dry Resin
Key Features
to remove specific ions from the air.
In general, gas-phase chemical filters are used to remove AMC in industrial sites where odor and harmful gases are generated, to improve the yield of fine electronic manufacturing processes such as semiconductors, OLED, and to protect workers.
TRILITE® dry resin is a product optimized for various gas-phase chemical filters, and customized products can be supplied to maximize on-site workability and performance, including various ion types, particle sizes, and moisture levels, according to customer requests.
* AMC(Airborne Molecular Contamination)
The contamination of airborne molecules that can have harmful effects on the production process or on human health.
Gas Removal
Mechanism
- Reaction pathway of Acid gas
-
-R-N-OH + HCl → -R-N-Cl + H2O
-R-N-OH + HF → -R-N-F + H2O
2(-R-N-OH) + H2SO4 → 2(-R-N-)SO4 + 2H2O
- Reaction pathway of Base gas
-
R-SO3H + NH4OH → R-SO3NH4 + H2O
Applicable
Areas
Product
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